Biography of TMAH wet etch station
AU & SO Details
| Authorized Users till date: 79 |
|---|
| System Owners till date: 7 |
Names of all System Owners
| Nikhilendu Tiwary, Jayashree Ravindranathan, Punam Murkute, Jawaid Alam, Sonali Sali, Sharanya Sasidharan, Minita Surwade (NH) |
Reservation Details
| Year | No. of Bookings | Usage (in hrs.) | Tool blocked (in hrs.) |
|---|---|---|---|
| 2013 | 34 | 114.5 | 0 |
| 2014 | 68 | 240.5 | 2.5 |
| 2015 | 90 | 257.5 | 267 |
| 2016 | 135 | 573 | 8 |
| 2017 | 122 | 394 | 0 |
| 2018 | 51 | 212 | 17 |
| 2019 | 35 | 83.5 | 9 |
| 2020 | 0 | 0 | 67.5 |
| 2021 | 26 | 119 | 112 |
| 2022 | 14 | 31.5 | 30 |
| 2023 | 5 | 8.5 | 757.5 |
| 2024 | 4 | 4 | 0 |
Total bookings:
584
Total hours: 2038
Total hours of blackout: 1270.5
Complaint Details
| Year | No. of Complaints | Complaints Resolved | Downtime(In days) |
|---|---|---|---|
| 2017 | 1 | 1 | 44 |
Total Downtime: 44