Biography of LPCVD Furnace_Thermal oxidation
AU & SO Details
| Authorized Users till date: 9 |
|---|
| System Owners till date: 3 |
Names of all System Owners
| Pradnya Chabbi, Hemant Kshirsagar, Anjum Khan |
Reservation Details
| Year | No. of Bookings | Usage (in hrs.) | Tool blocked (in hrs.) |
|---|---|---|---|
| 2013 | 0 | 0 | 0 |
| 2014 | 0 | 0 | 0 |
| 2015 | 0 | 0 | 0 |
| 2016 | 0 | 0 | 0 |
| 2017 | 0 | 0 | 0 |
| 2018 | 0 | 0 | 0 |
| 2019 | 0 | 0 | 0 |
| 2020 | 0 | 0 | 2108.5 |
| 2021 | 0 | 0 | 661.5 |
| 2022 | 7 | 56 | 92.5 |
| 2023 | 4 | 47 | 4745.5 |
| 2024 | 0 | 0 | 0 |
Total bookings:
11
Total hours: 103
Total hours of blackout: 7608
Complaint Details
| Year | No. of Complaints | Complaints Resolved | Downtime(In days) |
|---|---|---|---|
| 2020 | 1 | 1 | 113 |
Total Downtime: 113