Biography of Hot wire CVD(HWCVD)
AU & SO Details
| Authorized Users till date: 84 |
|---|
| System Owners till date: 2 |
Names of all System Owners
| Anjum Khan, Girish Chukka |
Reservation Details
| Year | No. of Bookings | Usage (in hrs.) | Tool blocked (in hrs.) |
|---|---|---|---|
| 2013 | 252 | 474 | 280 |
| 2014 | 182 | 423 | 225 |
| 2015 | 130 | 402 | 124 |
| 2016 | 67 | 268.5 | 32 |
| 2017 | 57 | 259 | 30 |
| 2018 | 15 | 69 | 58.5 |
| 2019 | 2 | 11.5 | 1204.5 |
| 2020 | 0 | 0 | 3488 |
| 2021 | 0 | 0 | 1130 |
| 2022 | 15 | 68 | 22 |
| 2023 | 9 | 52.5 | 740.5 |
| 2024 | 0 | 0 | 0 |
Total bookings:
729
Total hours: 2027.5
Total hours of blackout: 7334.5
Complaint Details
| Year | No. of Complaints | Complaints Resolved | Downtime(In days) |
|---|---|---|---|
| 2015 | 1 | 1 | 532 |
| 2016 | 2 | 2 | 11 |
| 2017 | 3 | 3 | 14 |
Total Downtime: 557
AMC Details
| AMC Taken (Duration: 16-02-2015 to 15-02-2016) |
| Cost: 0 |
| Work Done : PM visit done as per plan for i poly chamber |
|
| Report Submitted: ✓ |
| Work Done : PM visit done as per plan for Silicon Nitride chamber |
|
| Report Submitted: ✓ |
0 |
| Work Done : PM visit done as per plan for p poly chamber |
|
| Report Submitted: ✓ |
0 |
| Work Done : 2nd PM visit done as per plan - i poly chamber |
|
| Report Submitted: ✓ |
| Work Done : 2nd PM visit done as per plan - p poly chamber |
|
| Report Submitted: ✓ |
| Work Done : 2nd PM visit done as per plan - SiN & LL chamber |
|
| Report Submitted: ✓ |
| Work Done : 3rd PM visit done by EMT as per plan |
|
| Report Submitted: ✓ |
| Work Done : 3rd PM visit done by EMT as per plan |
|
| Report Submitted: ✓ |
| Work Done : 3rd PM visit done by EMT as per plan |
|
| Report Submitted: ✓ |
| Work Done : 3rd PM visit done by EMT as per plan |
|
| Report Submitted: ✓ |
| Work Done : PM visit done as per plan |
|
| Report Submitted: ✓ |
| AMC Taken (Duration: 15-02-2016 to 14-02-2017) |
| Cost: 0 |
| Work Done : 1st PM done by EMT for SiN chamber |
|
| Report Submitted: ✓ |
| Work Done : 1st PM done by EMT for i-poly chamber |
|
| Report Submitted: ✓ |
| Work Done : 1st PM done by EMT for p-poly chamber |
|
| Report Submitted: ✓ |
| Work Done : 1st PM done by EMT for load lock chamber |
|
| Report Submitted: ✓ |
| AMC Taken (Duration: 15-02-2017 to 14-02-2018) |
| Cost: 0 |
| Work Done : 1st PM current year 2017
HWCVD LL |
|
| Report Submitted: ✓ |
| Work Done : 1st PM current year 2017 HWCVD P-poly |
|
| Report Submitted: ✓ |
| Work Done : 1st PM current year 2017 HWCVD SiN |
|
| Report Submitted: ✓ |
| Work Done : 2nd PM current year 2017
Load lock |
|
| Report Submitted: ✓ |
| Work Done : 2nd PM current year 2017
P poly |
|
| Report Submitted: ✓ |
| Work Done : 2nd PM current year 2017
SiN |
|
| Report Submitted: ✓ |
| AMC Taken (Duration: 15-02-2018 to 14-02-2019) No Data Found |
| AMC Taken (Duration: 15-02-2019 to 14-02-2020) |
| Cost: 0 |
| Work Done : SiN Chamber PM has Done |
|
| Report Submitted: ✓ |
0 |
| Work Done : P Poly Chamber PM has Done |
|
| Report Submitted: ✓ |
0 |
| AMC Taken (Duration: 01-10-2023 to 30-09-2024) |
| Cost: 0 |
| Work Done : SiN Chamber PM has done |
|
| Report Submitted: ✓ |
0 |