Biography of Plasma Immersion Ion Implantation (PIII)
AU & SO Details
| Authorized Users till date: 68 |
|---|
| System Owners till date: 5 |
Names of all System Owners
| Sandeep SS, Priyanka Kumari, Anjum Khan, Jayeeta Sen, Arpit Mishra |
Reservation Details
| Year | No. of Bookings | Usage (in hrs.) | Tool blocked (in hrs.) |
|---|---|---|---|
| 2013 | 111 | 628.5 | 177.5 |
| 2014 | 78 | 367 | 1205 |
| 2015 | 100 | 330.5 | 208.5 |
| 2016 | 73 | 313 | 56.5 |
| 2017 | 39 | 182 | 42.5 |
| 2018 | 13 | 62 | 229 |
| 2019 | 32 | 176.5 | 66 |
| 2020 | 8 | 47 | 148.5 |
| 2021 | 7 | 35 | 278.5 |
| 2022 | 12 | 70.5 | 22 |
| 2023 | 2 | 13.5 | 671 |
| 2024 | 11 | 49.5 | 3.5 |
Total bookings:
486
Total hours: 2275
Total hours of blackout: 3108.5
Complaint Details
| Year | No. of Complaints | Complaints Resolved | Downtime(In days) |
|---|---|---|---|
| 2017 | 5 | 4 | 784 |
| 2018 | 3 | 3 | 597 |
| 2019 | 1 | 1 | 15 |
| 2020 | 2 | 2 | 5 |
Total Downtime: 1401
AMC Details
| AMC Taken (Duration: 01-01-2015 to 31-12-2015) |
| Cost: 0 |
| Work Done : PM visit done as per plan |
|
| Report Submitted: ✓ |
| Work Done : 2nd PM visit done as per plan for PH3 chamber |
|
| Report Submitted: ✓ |
| Work Done : 3rd PM visit done by EMT as per plan |
|
| Report Submitted: ✓ |
| Work Done : 3rd PM visit done by EMT as per plan |
|
| Report Submitted: ✓ |
| Work Done : PM visit done as per plan |
|
| Report Submitted: ✓ |
| AMC Taken (Duration: 15-02-2016 to 14-02-2017) |
| Cost: 0 |
| Work Done : 1st PM done by EMT for Ph3 chamber |
|
| Report Submitted: ✓ |
| AMC Taken (Duration: 15-02-2017 to 14-02-2018) |
| Cost: 0 |
| Work Done : 1st PM current year 2017
PH3 |
|
| Report Submitted: ✓ |
| Work Done : 1st PM current year 2017 B2H6 |
|
| Report Submitted: ✓ |
| Work Done : 2nd PM current year 2017 B2H6 |
|
| Report Submitted: ✓ |
| Work Done : 2nd PM current year 2017 PH3 |
|
| Report Submitted: ✓ |
| AMC Taken (Duration: 15-02-2018 to 14-02-2019) |
| Cost: 0 |
| Work Done : Boron chamber rotary pump pfeiffer service / inspection report |
|
| Report Submitted: ✓ |
| AMC Taken (Duration: 15-02-2019 to 14-02-2020) |
| Cost: 0 |
| Work Done : B2H6 PM has Done |
|
| Report Submitted: ✓ |
0 |
| Work Done : PIII PH3 PM has been done. |
|
| Report Submitted: ✓ |
0 |
| AMC Taken (Duration: 01-10-2023 to 30-09-2024) No Data Found |