List of Tools in NMPF Lab
LPCVD Furnace_SixNy (Biography of tool)
- Faculty Incharge : Udayan Ganguly
- System Owner : Hemant Kshirsagar
LPCVD Furnace_PolySi Doped PolySi (Biography of tool)
- Faculty Incharge : Udayan Ganguly
- System Owner : Hemant Kshirsagar
LPCVD Furnace_Thermal oxidation (Biography of tool)
- Operator : Hemant Kshirsagar
- Faculty Incharge : Udayan Ganguly
- System Owner : Hemant Kshirsagar
 | NMPF Wetbench_2 inch RCA Piranha (Biography of tool) |
- Faculty Incharge : Saurabh Lodha
- System Owner : Anjum Khan
| Wet bench_Metal etching (Biography of tool) |
- Operator : Hemant Kshirsagar
- Faculty Incharge : Saurabh Lodha
- System Owner : Hemant Kshirsagar